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Dow Chemical

Deep Ultraviolet Photolithography
Semiconductor Fab

JM Coull completed the design and construction of the FAB 3-DUV, ISO 3 cleanroom for Shipley Company, a worldwide manufacturer of complex chemicals used in the manufacturing of microchips, later acquired by Dow Chemical.

Project Features:
  • 12,000 sf total
  • ISO 3 cleanroom
  • Temperature 68° ± 1/2° F and humidity 45% ± 1% RH
  • Strict limitations on vibration, molecular outgassing, sound levels, and room pressurization

Location: Marlborough, MA
Size: 12,000 sf
Value: $4 million
Delivery Method: Design-Build
Architect: Woodbrier Associates


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JM Coull, Inc.
20 Powder Mill Road
Maynard, MA 01754

Phone: (978) 461-0330 | (978) 461-0275

Construction management, design-build, and general contracting firm specializing in new construction and renovation projects in the life sciences, education, healthcare, commercial, advanced technology, and institutional industries.

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